CHIRPED SYNTHETIC-WAVELENGTH INTERFEROMETRY

被引：19

作者：

DEGROOT, P ^{[1
]}

MCGARVEY, J ^{[1
]}

机构：

[1] BOEING CO,CTR HIGH TECHNOL,SEATTLE,WA 98124

来源：

OPTICS LETTERS | 1992年 / 17卷 / 22期

关键词：

D O I：

10.1364/OL.17.001626

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate distance measurement by varying, or chirping, the synthetic wavelength in a two-color laser diode interferometer. An absolute accuracy of 3 mum is achieved over a 200-mm range, without the phase ambiguities or optical complexities normally associated with synthetic-wavelength interferometry. The fiber-coupled experimental system uses a 25-muW, 0.25-mm-diameter collimated object beam and can be used for dimensional gauging and rough-surface profiling.

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页码：1626 / 1628

页数：3

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