INTERFEROMETRIC LASER PROFILOMETER FOR ROUGH SURFACES

被引:20
作者
DEGROOT, P [1 ]
机构
[1] HUGHES DANBURY OPT SYST, DANBURY, CT 06810 USA
关键词
D O I
10.1364/OL.16.000357
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A simple synthetic-wavelength interferometer is reported that uses two wavelengths of a multimode laser diode. The difference in interferometric phase measurements at the two wavelengths provides absolute range information to an accuracy of 0.75-mu-m over an ambiguity interval of 310-mu-m. The instrument can be used to profile surfaces too rough to be measured by conventional interferometry.
引用
收藏
页码:357 / 359
页数:3
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