AN ALTERED LAYER MODEL FOR ION ASSISTED DEPOSITION UNDER NET SPUTTERING EROSION CONDITIONS

被引：10

作者：

CARTER, G

KATARDJIEV, IV

NOBES, MJ

机构：

[1] Univ of Salford, Salford, Engl, Univ of Salford, Salford, Engl

来源：

VACUUM | 1988年 / 38卷 / 02期

关键词：

D O I：

10.1016/0042-207X(88)90608-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：117 / 121

页数：5

共 31 条

[1]

AMANO J, 1977, J VAC SCI TECHNOL, V14, P695, DOI 10.1116/1.569185

[2] DEPTH RESOLUTION OF SPUTTER PROFILING [J].

ANDERSEN, HH .

APPLIED PHYSICS, 1979, 18 (02) :131-140

[3]

Arifov U. A., 1974, Radiation Effects, V22, P259, DOI 10.1080/10420157408230803

[4] THE USE OF ION-BEAMS IN THIN-FILM DEPOSITION [J].

ARMOUR, DG ;

BAILEY, P ;

SHARPLES, G .

VACUUM, 1986, 36 (11-12) :769-775

[5]

BETZ G, 1983, TOP APPL PHYS, V52, P11

[6] THEORY OF THIN-FILM ORIENTATION BY ION-BOMBARDMENT DURING DEPOSITION [J].

BRADLEY, RM ;

HARPER, JME ;

SMITH, DA .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4160-4164

[7] THE INTERACTION OF LOW-ENERGY ION-BEAMS WITH SURFACES [J].

CARTER, G ;

ARMOUR, DG .

THIN SOLID FILMS, 1981, 80 (1-3) :13-30

[8] A 1ST ORDER DIFFUSION-APPROXIMATION TO ATOMIC REDISTRIBUTION DURING ION-BOMBARDMENT OF SOLIDS, .2. FINITE-RANGE APPROXIMATION [J].

CARTER, G ;

COLLINS, R ;

THOMPSON, DA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1981, 55 (1-2) :99-110

[9] ATOMIC MIXING DURING MULTIPLE SPECIES IMPLANTATION OF SI [J].

CARTER, G ;

ARMOUR, DG ;

KOSTIC, S ;

JIMENEZRODRIGUEZ, JJ ;

KARPUZOV, DS ;

NOBES, MJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :758-761

[10]

CARTER G, 1962, P PHYS SOC, V79, P508

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