NEW TYPE OF PRECISION ELLIPSOMETER WITHOUT EMPLOYING A COMPENSATOR

被引：19

作者：

YAMAMOTO, M ^{[1
]}

机构：

[1] GAKUSHUIN UNIV,DEPT PHYS,MEJIRO,TOKYO,JAPAN

来源：

OPTICS COMMUNICATIONS | 1974年 / 10卷 / 02期

关键词：

D O I：

10.1016/0030-4018(74)90054-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：200 / 202

页数：3

相关论文

共 11 条

[1] SOURCES OF ERROR IN ELLIPSOMETRY
JERRARD, HG
[J]. SURFACE SCIENCE, 1969, 16 : 67 - &
[2] TEMPERATURE DEPENDENCE OF OPTICAL SURFACE THICKNESS OF WATER
KINOSITA, K
YOKOTA, H
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1965, 20 (06) : 1086 - &
[3] KINOSITA K, 1962, JPN J APPL PHYS, V1, P234
[4] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +
[5] A NOTE ON THE THEORIES UNDERLYING THE POLARIMETRIC STUDY OF VERY THIN DIELECTRIC SURFACE LAYERS
NOMURA, S
KINOSITA, K
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1959, 14 (03) : 297 - 303
[6] Sissingh R, 1926, PHYS Z, V27, P518
[7] SMITH PH, 1969, SURFACE SCI, V16, P33
[8] YAMAMOTO M, TO BE PUBLISHED
[9] ELLIPSOMETRIC STUDY OF POLISHED GLASS SURFACES
YOKOTA, H
SAKATA, H
NISHIBOR.M
KINOSITA, K
[J]. SURFACE SCIENCE, 1969, 16 : 265 - &
[10] TEMPERATURE DEPENDENCE OF OPTICAL SURFACE THICKNESSES OF ALPHA-METHYLNAPHTHALENE AND CARBONTETRACHLORIDE
YOKOTA, H
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1966, 21 (01) : 200 - &