ION-ASSISTED DEPOSITION AND METASTABLE STRUCTURES

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] Angus J.C., 1986, PLASMA DEPOSITED THI, P89

[3] APPLETON BA, 1987, MRS BULL, V12, P52

[4] BADZIAN AR, 1987, AMORPHOUS HYDROGENAT, P63

[5] Beasly M. R., 1984, Percolation, Localization and Superconductivity. Proceedings of a NATO Advanced Study Institute, P115

[6] FUNCTION OF SUBSTRATE BIAS POTENTIAL FOR FORMATION OF CUBIC BORON-NITRIDE FILMS IN PLASMA CVD TECHNIQUE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09): : L1435 - L1436

[7] GAUTHERIN G, 1985, THIN FILMS FREE ATOM, P203

[8] GREENE JE, 1984, CRC CR REV SOL STATE, V11, P189

[9] DEVELOPMENTS IN BROAD-BEAM ION-SOURCE TECHNOLOGY AND APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 337 - 339

[10] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .1. EXPERIMENTAL APPROACH [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 550 - 555

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] Angus J.C., 1986, PLASMA DEPOSITED THI, P89

[3] APPLETON BA, 1987, MRS BULL, V12, P52

[4] BADZIAN AR, 1987, AMORPHOUS HYDROGENAT, P63

[5] Beasly M. R., 1984, Percolation, Localization and Superconductivity. Proceedings of a NATO Advanced Study Institute, P115

[6] FUNCTION OF SUBSTRATE BIAS POTENTIAL FOR FORMATION OF CUBIC BORON-NITRIDE FILMS IN PLASMA CVD TECHNIQUE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09): : L1435 - L1436

[7] GAUTHERIN G, 1985, THIN FILMS FREE ATOM, P203

[8] GREENE JE, 1984, CRC CR REV SOL STATE, V11, P189

[9] DEVELOPMENTS IN BROAD-BEAM ION-SOURCE TECHNOLOGY AND APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 337 - 339

[10] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .1. EXPERIMENTAL APPROACH [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 550 - 555