SURFACE MORPHOLOGY OF HCL ETCHED SILICON WAFERS .2. BUNCH FORMATION

[1] SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) : 4673 - &

[2] BENNEMA P, 1973, CRYSTAL GROWTH INTRO, P317

[3] SURFACE MORPHOLOGY OF EPITAXIAL SILICON [J]. JOURNAL OF CRYSTAL GROWTH, 1971, 11 (02) : 131 - +

[4] THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) : 299 - 358

[5] Cabrera N., 1958, GROWTH PERFECTION CR, P393

[6] KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE - MASS-SPECTROMETRIC INVESTIGATION BY MOLECULAR-BEAM SAMPLING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) : 899 - 907

[7] Frank F. C., 1958, GROWTH PERFECTION CR, P411

[8] SILICON HOMOEPITAXIAL THIN-FILMS VIA SILANE PYROLYSIS - HEED AND AUGER-ELECTRON SPECTROSCOPY STUDY [J]. SURFACE SCIENCE, 1972, 30 (02) : 310 - +

[9] KOCK AJR, 1973, THESIS CATHOLIC U NI

[10] KUYER TJM, 1974, J CRYSTAL GROWTH, V22, P29

[1] SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) : 4673 - &

[2] BENNEMA P, 1973, CRYSTAL GROWTH INTRO, P317

[3] SURFACE MORPHOLOGY OF EPITAXIAL SILICON [J]. JOURNAL OF CRYSTAL GROWTH, 1971, 11 (02) : 131 - +

[4] THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) : 299 - 358

[5] Cabrera N., 1958, GROWTH PERFECTION CR, P393

[6] KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE - MASS-SPECTROMETRIC INVESTIGATION BY MOLECULAR-BEAM SAMPLING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) : 899 - 907

[7] Frank F. C., 1958, GROWTH PERFECTION CR, P411

[8] SILICON HOMOEPITAXIAL THIN-FILMS VIA SILANE PYROLYSIS - HEED AND AUGER-ELECTRON SPECTROSCOPY STUDY [J]. SURFACE SCIENCE, 1972, 30 (02) : 310 - +

[9] KOCK AJR, 1973, THESIS CATHOLIC U NI

[10] KUYER TJM, 1974, J CRYSTAL GROWTH, V22, P29