SELECTIVE GROWTH OF B-1-NBN IN NB THIN-FILM BY HIGH-DOSE NITROGEN MOLECULAR ION-IMPLANTATION

被引：1

作者：

TANABE, N ^{[1
]}

IWAKI, M ^{[1
]}

机构：

[1] RIKEN INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 06期

关键词：

D O I：

10.1557/JMR.1988.1227

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1227 / 1231

页数：5

共 16 条

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