SCANNING PROBE METROLOGY

The high resolution, three-dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better than 10 nm. To achieve this level of performance, the nonlinear behavior of the piezoceramic actuators and of the probe-sample interaction must be carefully controlled. Positioning of the actuators can be addressed in a straightforward manner. The probe-sample interaction is, on the other hand, a difficult problem, which depends on the topography being measured.