A SCANNING TUNNELING MICROSCOPE WITH A CAPACITANCE-BASED POSITION MONITOR

被引：34

作者：

GRIFFITH, JE ^{[1
]}

MILLER, GL ^{[1
]}

GREEN, CA ^{[1
]}

GRIGG, DA ^{[1
]}

RUSSELL, PE ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV,RALEIGH,NC 27695

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.584895

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A serious impediment to precision metrology with scanning probe microscopes is the unreproducible, nonlinear behavior of the piezo ceramic actuators. We have developed a simple solution to the problem by measuring the position of the scanning head with capacitors. The circuit monitoring the gap between the plates has a linear response with slope 12-mu-m/V and noise of 0.1 nm/square-root Hz. The linearity of the system is verified by comparing the capacitor output with a scan of a grating that is periodic in two dimensions. We analyze the errors associated with the technique and show how to reduce them to acceptable levels.

引用

页码：2023 / 2027

页数：5

共 9 条

[1] FINITE-ELEMENT ANALYSIS OF PZT TUBE SCANNER MOTION FOR SCANNING TUNNELLING MICROSCOPY [J].