LINEWIDTH MEASUREMENT BY A NEW SCANNING TUNNELING MICROSCOPE

被引：30

作者：

YAMADA, H

FUJII, T

NAKAYAMA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 11期

关键词：

D O I：

10.1143/JJAP.28.2402

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2402 / 2404

页数：3

共 6 条

BOBROFF, N .

APPLIED OPTICS, 1987, 26 (13) :2676-2682

[2] SCANNING TUNNELING MICROSCOPE INSTRUMENTATION [J].

KUK, Y ;

SILVERMAN, PJ .

POSTEK, MT ;

JOY, DC .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1987, 92 (03) :205-228

SMITH, ST ;

CHETWYND, DG ;

BOWEN, DK .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (08) :977-983

TANAKA, M ;

NAKAYAMA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (04) :L233-L235

[6]

Yamada H., 1987, Journal of the Japan Society of Precision Engineering, V53, P1817, DOI 10.2493/jjspe.53.1817