DESIGN AND ASSESSMENT OF MONOLITHIC HIGH-PRECISION TRANSLATION MECHANISMS

The elastic design approach to the problem of high-precision translation mechanisms is studied. A family of such devices, mechanisms cut from a monolith and using 'web hinges', is examined in detail. Simple design rules, derived in part from finite-element analysis, are given, and manufacturing tolerances considered. It is demonstrated that the drive system can cause significant parasitic motion even in very stiff systems, and so a non-contact force transducer utilizing a solenoid and permanent magnet is investigated. Design formulae are presented. Experimental investigation confirms that even with very routine, low-cost manufacturing methods the combination of these devices can produce 'slideways' with subanometer out-of-plane inaccuracies.