ON THE CONSTRUCTION OF A ZERODUR TRANSLATION DEVICE FOR X-RAY INTERFEROMETRIC SCANNING

被引：13

作者：

ALEMANNI, M

MANA, G

PEDROTTI, G

STRONA, PP

ZOSI, G

机构：

[1] COMAU,GRUGLIASCO,ITALY

[2] IST METROL G COLONNETTI,TORINO,ITALY

来源：

METROLOGIA | 1986年 / 22卷 / 01期

关键词：

D O I：

10.1088/0026-1394/22/1/004

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：55 / 63

页数：9

共 15 条

[1]

BECKER P, 1984, NBS SPEC PUB, V617, P317

[2]

BLAYNEY JR, CITED INDIRECTLY

[3] PARALLEL MOVEMENT FOR HIGH FINESSE INTERFEROMETRIC SCANNING [J].

BRADLEY, DJ .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1962, 39 (02) :41-&

[4]

BREITINGER R, 1969, WERKSTATTSTECHNIK, V59, P78

[5] X-RAY TO VISIBLE WAVELENGTH RATIOS [J].

DESLATTES, RD ;

HENINS, A .

PHYSICAL REVIEW LETTERS, 1973, 31 (16) :972-975

[6] OPTICAL AND X-RAY INTERFEROMETRY OF A SILICON LATTICE SPACING [J].

DESLATTES, RD .

APPLIED PHYSICS LETTERS, 1969, 15 (11) :386-+

[7]

JONES RV, 1951, J PHYS E, V33, P11

[8]

NAKAYAMA K, 1982, B NRLM IBARAKI, V31, P1

[9]

Paros J., 1965, MACH DES, V37, P151

[10]

RADEMACHER HJ, 1974, PTBAPH8 PHYS TECHN B, P66

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