A NEW OPTICAL INTERFEROMETER FOR ABSOLUTE MEASUREMENT OF LINEAR DISPLACEMENT IN THE SUBNANOMETER RANGE

被引：22

作者：

TANAKA, M

NAKAYAMA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 04期

关键词：

D O I：

10.1143/JJAP.22.L233

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L233 / L235

页数：3

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TANAKA, M ;

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NAKAYAMA, K .

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