MECHANICAL STRESSES IN DC REACTIVELY SPUTTERED FE2O3 THIN-FILMS

被引：9

作者：

ORLINOV, V ^{[1
]}

SAROV, G ^{[1
]}

机构：

[1] INST SEMICOND TECHNOL, BOTEVGRAD, BULGARIA

来源：

THIN SOLID FILMS | 1980年 / 68卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90266-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：333 / 343

页数：11

相关论文

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[7] DC REACTIVELY SPUTTERED IRON-OXIDE FILMS FOR SELECTIVELY SEMITRANSPARENT PHOTOMASKS .2. RELATION BETWEEN THE STRUCTURE OF THE FILMS AND THEIR MECHANICAL AND CHEMICAL-PROPERTIES
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