BROAD FULLERENE ION-BEAM GENERATION AND BOMBARDMENT EFFECTS

被引：5

作者：

HORAK, PD

GIBSON, UJ

机构：

[1] Thayer School of Engineering, Dartmouth College, Hanover

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 08期

关键词：

D O I：

10.1063/1.112164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the generation of a large, moderate current density beam of fullerenes from a Kaufman ion source, and initial results on the use of the beam for ion assisted deposition of MgF2 and for growth of hard amorphous carbon films. A 50-100 muA/cm2 beam of fullernes approximately 3.0 cm in diameter was generated; singly and doubly ionized fullerenes were observed after passage through a mass analyzer, with little or no indication of breakdown of the fullerenes. The beam energy was varied over the range 100-700 eV, and continuous beam operation was maintained for approximately 30 min on an initial charge of 150 mg of fullerenes. Low friction, wear resistant coatings were generated from fullerene-ion bombardment of fullerene neutrals, and optical degradation of MgF2 films bombarded during growth was observed.

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页码：968 / 970

页数：3

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