SPUTTERING OF CU ATOMS BY AR IONS

被引：20

作者：

LIKONEN, J ^{[1
]}

HAUTALA, M ^{[1
]}

机构：

[1] UNIV HELSINKI,DEPT PHYS,SF-00170 HELSINKI 17,FINLAND

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 02期

关键词：

D O I：

10.1007/BF02565201

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：137 / 150

页数：14

共 49 条

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[8]

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