SPUTTERING OF CU ATOMS BY AR IONS

被引:20
作者
LIKONEN, J [1 ]
HAUTALA, M [1 ]
机构
[1] UNIV HELSINKI,DEPT PHYS,SF-00170 HELSINKI 17,FINLAND
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 02期
关键词
D O I
10.1007/BF02565201
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:137 / 150
页数:14
相关论文
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