EJECTION PROCESS IN COLLISIONAL SPUTTERING

被引：18

作者：

FALCONE, G

机构：

[1] CNR,UNITA COSENZA,NAZL STRUTTURA MAT,I-87036 ARCAVACATA RENDE,ITALY

[2] MINIST PUBBL ISTRUZIONE,CTR INTERUNIV STRUTTURA MAT,I-87036 ARCAVACATA RENDE,ITALY

来源：

PHYSICAL REVIEW B | 1986年 / 33卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.33.5054

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5054 / 5056

页数：3

共 22 条

[1]

ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1, P144

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[3] UNIFIED SPUTTERING THEORY [J].

BRANDT, W ;

LAUBERT, R .

NUCLEAR INSTRUMENTS & METHODS, 1967, 47 (02) :201-&

[4] SPUTTERING OF THE GALLIUM-INDIUM EUTECTIC ALLOY IN THE LIQUID-PHASE [J].

DUMKE, MF ;

TOMBRELLO, TA ;

WELLER, RA ;

HOUSLEY, RM ;

CIRLIN, EH .

SURFACE SCIENCE, 1983, 124 (2-3) :407-422

[5] UNIFIED THEORY OF COLLISIONAL SPUTTERING [J].

FALCONE, G .

RADIATION EFFECTS LETTERS, 1984, 85 (02) :75-80

[6] SPUTTERING YIELDS OF RANDOM SOLIDS BY KEV LIGHT-ION BOMBARDMENT - A NEW MODEL [J].

FALCONE, G ;

OLIVA, A .

RADIATION EFFECTS LETTERS, 1984, 86 (2-3) :57-62

[7] ON THE EXISTENCE OF AN UNIVERSAL ENERGY FUNCTION FOR SPUTTERING YIELDS BY LOW-ENERGY LIGHT-ION BOMBARDMENT [J].

FALCONE, G ;

OLIVA, A .

NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1985, 5 (05) :464-470

[8] DEPTH OF ORIGIN OF SPUTTERED ATOMS [J].

FALCONE, G ;

SIGMUND, P .

APPLIED PHYSICS, 1981, 25 (03) :307-310

[9] ENERGY-SPECTRA OF ATOMS SPUTTERED BY KEV LIGHT-ION BOMBARDMENT [J].

FALCONE, G ;

OLIVA, A .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04) :201-203

[10]

FELLER W, 1966, INTRO PROBABILITY TH, V1

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