EJECTION PROCESS IN COLLISIONAL SPUTTERING

被引：18

作者：

FALCONE, G

机构：

[1] CNR,UNITA COSENZA,NAZL STRUTTURA MAT,I-87036 ARCAVACATA RENDE,ITALY

[2] MINIST PUBBL ISTRUZIONE,CTR INTERUNIV STRUTTURA MAT,I-87036 ARCAVACATA RENDE,ITALY

来源：

PHYSICAL REVIEW B | 1986年 / 33卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.33.5054

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5054 / 5056

页数：3

共 22 条

[11] COMPUTER-SIMULATION OF SPUTTERING OF CLUSTERS [J].

HARRISON, DE ;

DELAPLAIN, CB .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) :2252-2259

[12] SPUTTERING MODELS - A SYNOPTIC VIEW [J].

HARRISON, DE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64

[13]

JACKSON DP, 1980, P S SPUTTERING, P2

[14] THE MECHANISMS OF SPUTTERING .1. PROMPT AND SLOW COLLISIONAL SPUTTERING [J].

KELLY, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1984, 80 (3-4) :273-317

[15]

LINDHARD J, 1968, MAT FYS MEDD KGL DAN, V36

[16]

LINDHARD J, 1963, MAT FYS MEDD KGL DAN, V33

[17] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

PHYSICAL REVIEW, 1969, 184 (02) :383-+

[18] SPUTTERING OF MULTICOMPONENT MATERIALS - ELEMENTS OF A THEORY [J].

SIGMUND, P ;

OLIVA, A ;

FALCONE, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :541-548

[19]

SIGMUND P, 1977, INELASTIC ION SURFAC, P121

[20]

SIGMUND P, 1981, SPUTTERING ION BOMBA, P8

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