UNIFIED THEORY OF COLLISIONAL SPUTTERING

被引：5

作者：

FALCONE, G ^{[1
]}

机构：

[1] CNR,UNITA CNSM,COSENZA,ITALY

来源：

RADIATION EFFECTS LETTERS | 1984年 / 85卷 / 02期

关键词：

D O I：

10.1080/01422448408209682

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：75 / 80

页数：6

共 14 条

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[2] UNIFIED SPUTTERING THEORY
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LAUBERT, R
[J]. NUCLEAR INSTRUMENTS & METHODS, 1967, 47 (02): : 201 - &
[3] SPUTTERING YIELDS OF RANDOM SOLIDS BY KEV LIGHT-ION BOMBARDMENT - A NEW MODEL
FALCONE, G
OLIVA, A
[J]. RADIATION EFFECTS LETTERS, 1984, 86 (2-3): : 57 - 62
[4] DEPTH OF ORIGIN OF SPUTTERED ATOMS
FALCONE, G
SIGMUND, P
[J]. APPLIED PHYSICS, 1981, 25 (03): : 307 - 310
[5] ENERGY-SPECTRA OF ATOMS SPUTTERED BY KEV LIGHT-ION BOMBARDMENT
FALCONE, G
OLIVA, A
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04): : 201 - 203
[6] FALCONE G, UNPUB
[7] SPUTTERING THRESHOLDS
HARRISON, DE
MAGNUSON, GD
[J]. PHYSICAL REVIEW, 1961, 122 (05): : 1421 - &
[8] LINDHARD J, 1968, MAT FYS MEDD DAN VID, V36
[9] LITTMARK U, 1976, P SPIG, P139
[10] A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD
MATSUNAMI, N
YAMAMURA, Y
ITIKAWA, Y
ITOH, N
KAZUMATA, Y
MIYAGAWA, S
MORITA, K
SHIMIZU, R
[J]. RADIATION EFFECTS LETTERS, 1980, 57 (1-2): : 15 - 21