ROLE OF NEGATIVE-IONS IN THE RF PLASMA DEPOSITION OF FLUOROPOLYMER FILMS FROM PERFLUOROPROPANE

被引：23

作者：

HAQUE, Y

RATNER, BD

机构：

[1] UNIV WASHINGTON,DEPT CHEM ENGN,SEATTLE,WA 98195

[2] UNIV WASHINGTON,CTR BIOENGN,SEATTLE,WA 98195

来源：

JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS | 1988年 / 26卷 / 06期

关键词：

D O I：

10.1002/polb.1988.090260608

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：1237 / 1249

页数：13

共 13 条

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