LOW-LOSS EPITAXIAL ZNO OPTICAL WAVE-GUIDES ON SAPPHIRE BY RF MAGNETRON SPUTTERING

被引：49

作者：

WU, MS

AZUMA, A

SHIOSAKI, T

KAWABATA, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

关键词：

D O I：

10.1063/1.339458

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2482 / 2484

页数：3

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