DETERMINATION OF LATTICE MISMATCH IN NISI2 OVERLAYERS ON SI(111)

被引:13
作者
ZEGENHAGEN, J
KAYED, MA
HUANG, KG
GIBSON, WM
PHILLIPS, JC
SCHOWALTER, LJ
HUNT, BD
机构
[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222
[2] SUNY BUFFALO,DEPT CHEM,BUFFALO,NY 14214
[3] GE,SCHENECTADY,NY 12301
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 04期
关键词
D O I
10.1007/BF00624605
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:365 / 369
页数:5
相关论文
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