CHEMICAL VAPOR GROWTH OF BETA-SIC WHISKERS FROM A GAS-MIXTURE OF SI2CL6-CH4-H2-AR

被引：36

作者：

MOTOJIMA, S ^{[1
]}

HASEGAWA, M ^{[1
]}

HATTORI, T ^{[1
]}

机构：

[1] TOAGOSEI CHEM IND CO LTD, RES LAB, MINATO KU, NAGOYA 455, JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 87卷 / 2-3期

关键词：

D O I：

10.1016/0022-0248(88)90181-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：311 / 317

页数：7

共 32 条

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[20]

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