MEASUREMENT OF MIS CAPACITORS WITH OXYGEN-DOPED ALXGA1-XAS INSULATING LAYERS ON GAAS

被引：12

作者：

CASEY, HC

CHO, AY

LANG, DV

NICOLLIAN, EH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.569797

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1408 / 1411

页数：4

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