A COMPARATIVE-STUDY OF PHASE-STABILITY AND FILM MORPHOLOGY IN THIN-FILM CO/GAAS,RH/GAAS,IR/GAAS,NI/GAAS,PD/GAAS, AND PT/GAAS SYSTEMS

被引：92

作者：

SANDS, T ^{[1
]}

KERAMIDAS, VG ^{[1
]}

YU, KM ^{[1
]}

WASHBURN, J ^{[1
]}

KRISHNAN, K ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期

关键词：

D O I：

10.1063/1.339553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2070 / 2079

页数：10

相关论文

共 33 条

[1] SMOOTH AND CONTINUOUS OHMIC CONTACTS TO GAAS USING EPITAXIAL GE FILMS
ANDERSON, WT
CHRISTOU, A
DAVEY, JE
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (05) : 2998 - 3000
[2] OHMIC CONTACTS TO GAAS AND GAXAL1-XAS
BRASLAU, N
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03): : 700 - 701
[3] GATE METALLIZATION SINKING INTO THE ACTIVE CHANNEL IN TI/W/AU METALLIZED POWER MESFETS
CANALI, C
CASTALDO, F
FANTINI, F
OGLIARI, D
UMENA, L
ZANONI, E
[J]. IEEE ELECTRON DEVICE LETTERS, 1986, 7 (03) : 185 - 187
[4] INTERDIFFUSIONS IN THIN-FILM AU ON PT ON GAAS (100) STUDIES WITH AUGER-SPECTROSCOPY
CHANG, CC
MURARKA, SP
KUMAR, V
QUINTANA, G
[J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4237 - 4243
[5] QUANTITATIVE-ANALYSIS OF THIN SPECIMENS
CLIFF, G
LORIMER, GW
[J]. JOURNAL OF MICROSCOPY-OXFORD, 1975, 103 (MAR): : 203 - 207
[6] ELBORAGY M, 1981, Z METALLKD, V72, P279
[7] ELECTRON-MICROSCOPE STUDIES OF AN ALLOYED AU/NI-AU-GE OHMIC CONTACT TO GAAS
KUAN, TS
BATSON, PE
JACKSON, TN
RUPPRECHT, H
WILKIE, EL
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 6952 - 6957
[8] REACTIONS OF PD ON (100) AND (110) GAAS-SURFACES
KUAN, TS
FREEOUF, JL
BATSON, PE
WILKIE, EL
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) : 1519 - 1526
[9] KUAN TS, 1984, MATERIALS RES SOC S, V31, P143
[10] REACTION OF SPUTTERED PT FILMS ON GAAS
KUMAR, V
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1975, 36 (06) : 535 - 541

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