A COMPARATIVE-STUDY OF PHASE-STABILITY AND FILM MORPHOLOGY IN THIN-FILM CO/GAAS,RH/GAAS,IR/GAAS,NI/GAAS,PD/GAAS, AND PT/GAAS SYSTEMS

被引:92
作者
SANDS, T [1 ]
KERAMIDAS, VG [1 ]
YU, KM [1 ]
WASHBURN, J [1 ]
KRISHNAN, K [1 ]
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
关键词
D O I
10.1063/1.339553
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2070 / 2079
页数:10
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