INSITU MEASUREMENT OF THE METALORGANIC AND HYDRIDE PARTIAL PRESSURES IN A MOCVD REACTOR USING ULTRAVIOLET-ABSORPTION SPECTROSCOPY

被引：39

作者：

HEBNER, GA

KILLEEN, KP

BIEFELD, RM

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 98卷 / 03期

关键词：

D O I：

10.1016/0022-0248(89)90144-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：293 / 301

页数：9

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共 16 条

[11] THE ULTRAVIOLET-ABSORPTION SPECTRA OF SELECTED ORGANOMETALLIC COMPOUNDS USED IN THE CHEMICAL VAPOR-DEPOSITION OF GALLIUM-ARSENIDE
MCCRARY, VR
DONNELLY, VM
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 84 (02) : 253 - 258
[12] USE OF FLOW VISUALIZATION AND TRACER GAS STUDIES FOR DESIGNING AN INP-INGAASP OMVPE REACTOR
PALMATEER, SC
GROVES, SH
WANG, CA
WEYBURNE, DW
BROWN, RA
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 83 (02) : 202 - 210
[13] FACTORS INFLUENCING DOPING CONTROL AND ABRUPT METALLURGICAL TRANSITIONS DURING ATMOSPHERIC-PRESSURE MOVPE GROWTH OF ALGAAS AND GAAS
ROBERTS, JS
MASON, NJ
ROBINSON, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 422 - 430
[14] PYROLYSIS AND PHOTOLYSIS OF TRIMETHYLALUMINUM
SUZUKI, N
ANAYAMA, C
MASU, K
TSUBOUCHI, K
MIKOSHIBA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (08): : 1236 - 1242
[15] COMPOSITIONAL TRANSIENTS IN MOCVD GROWN III-V-HETEROSTRUCTURES
THRUSH, EJ
WHITEAWAY, JEA
WALEEVANS, G
WIGHT, DR
CULLIS, AG
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 412 - 421
[16] ZUHOSKI SP, 1987, MATER RES SOC S P, V101, P313