PRODUCTION OF A LARGE-DIAMETER UNIFORM ECR PLASMA WITH A LISITANO COIL

被引：18

作者：

YONESU, A

TAKEUCHI, Y

KOMORI, A

KAWAI, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 09期

关键词：

D O I：

10.1143/JJAP.27.L1746

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1746 / L1749

页数：4

共 13 条

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