DEFECT STRUCTURE OF VITREOUS SIO2-FILMS ON SILICON .2. CHANNEL AND NETWORK DEFECTS IN VITREOUS SIO2

被引：33

作者：

REVESZ, AG

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1980年 / 57卷 / 02期

关键词：

D O I：

10.1002/pssa.2210570223

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：657 / 666

页数：10

共 33 条

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