DEFECT STRUCTURE OF VITREOUS SIO2-FILMS ON SILICON .2. CHANNEL AND NETWORK DEFECTS IN VITREOUS SIO2

被引:33
作者
REVESZ, AG
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1980年 / 57卷 / 02期
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D O I
10.1002/pssa.2210570223
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:657 / 666
页数:10
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