MOLYBDENUM BERYLLIUM MULTILAYER MIRRORS FOR NORMAL INCIDENCE IN THE EXTREME-ULTRAVIOLET

被引：72

作者：

SKULINA, KM ^{[1
]}

ALFORD, CS ^{[1
]}

BIONTA, RM ^{[1
]}

MAKOWIECKI, DM ^{[1
]}

GULLIKSON, EM ^{[1
]}

SOUFLI, R ^{[1
]}

KORTRIGHT, JB ^{[1
]}

UNDERWOOD, JH ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,CTR XRAY OPT,BERKELEY,CA 94720

来源：

APPLIED OPTICS | 1995年 / 34卷 / 19期

关键词：

BERYLLIUM; MULTILAYER MIRRORS; EXTREME ULTRAVIOLET;

D O I：

10.1364/AO.34.003727

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on a series of normal-incidence reflectance measurements at wavelengths just longer than the beryllium K-edge (11.1 nm) from molybdenum/beryllium multilayer mirrors. The highest peak reflectance was 68.7 +/- 0.2% at lambda = 11.3 nm obtained from a mirror with 70 bilayers ending in beryllium. To our knowledge, this is the highest normal-incidence reflectance that has been demonstrated in the 1-80-nm spectral range.

引用

页码：3727 / 3730

页数：4

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