COPPER CONTAMINATION DURING VAPOR EPITAXIAL-GROWTH OF GAAS

被引:14
作者
FABRE, E
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1972年 / 9卷 / 01期
关键词
D O I
10.1002/pssa.2210090130
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:259 / &
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