CONDUCTIVITY AND P-N-TYPE CONTROL OF FLUORINATED AMORPHOUS-SILICON (A-SI-F) WITHOUT INCORPORATING HYDROGEN

被引：17

作者：

MATSUMURA, H

NAKAGOME, Y

FURUKAWA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 01期

关键词：

D O I：

10.1063/1.328491

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：291 / 295

页数：5

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[9] MATSUMURA H, UNPUBLISHED
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