CADMIUM-TIN-OXIDE FILMS DEPOSITED BY DC REACTIVE SPUTTERING FROM A CD-SN ALLOY TARGET

被引：25

作者：

MIYATA, N

MIYAKE, K

YAMAGUCHI, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 02期

关键词：

D O I：

10.1063/1.91816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：180 / 182

页数：3

共 8 条

[1] SPUTTER DEPOSITION AND CHARACTERIZATION OF CD2SNO4 FILMS [J].

HAACKE, G ;

MEALMAKER, WE ;

SIEGEL, LA .

THIN SOLID FILMS, 1978, 55 (01) :67-81

[2]

HAACKE G, 1976, APPL PHYS LETT, V28, P622, DOI 10.1063/1.88589

[3] TRANSPARENT CONDUCTING CADMIUM-TIN OXIDE-FILMS DEPOSITED BY RF SPUTTERING FROM A CDO-SNO2 TARGET [J].

MIYATA, N ;

MIYAKE, K ;

KOGA, K ;

FUKUSHIMA, T .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (04) :918-920

[4] PHYSICAL-PROPERTIES OF CADMIUM-TIN OXIDE-FILMS DEPOSITED BY DC REACTIVE SPUTTERING [J].

MIYATA, N ;

MIYAKE, K ;

NAO, S .

THIN SOLID FILMS, 1979, 58 (02) :385-389

[5] CADMIUM-TIN OXIDE-FILMS DEPOSITED BY RF SPUTTERING FROM A CDO-SNO2 TARGET [J].

MIYATA, N ;

MIYAKE, K ;

FUKUSHIMA, T ;

KOGA, K .

APPLIED PHYSICS LETTERS, 1979, 35 (07) :542-543

[6] TRANSPARENT ELECTRODE PROPERTIES OF CD-SN OXIDE-FILMS BY DC REACTIVE SPUTTERING [J].

MIYATA, N ;

MIYAKE, K .

SURFACE SCIENCE, 1979, 86 (JUL) :384-388

[7]

MIYATA N, 1978, JAP J APPLIED PHYS, V17, P1693

[8] OPTICAL AND ELECTRICAL PROPERTIES OF CD2SNO4 - A DEFECT SEMICONDUCTOR [J].

NOZIK, AJ .

PHYSICAL REVIEW B, 1972, 6 (02) :453-&

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