TRANSPARENT ELECTRODE PROPERTIES OF CD-SN OXIDE-FILMS BY DC REACTIVE SPUTTERING

被引：10

作者：

MIYATA, N

MIYAKE, K

机构：

[1] Faculty of Engineering, Yamaguchi University, Ube, Tokiwadai

来源：

SURFACE SCIENCE | 1979年 / 86卷 / JUL期

关键词：

D O I：

10.1016/0039-6028(79)90417-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Films of cadmium-tin oxide were prepared by dc reactive sputtering of alloy target in ArO2 mixtures. The lowest resistivity obtained was 4 × 10-4 Ω cm and the average optical transmission was 90% in the visible region. The films were annealed at temperatures up to 400°C. The optical and electrical properties of the films were examined as a function of annealing conditions, such as atmosphere, temperature, and time. These properties of the films are believed to be related to the amount of oxygen deficiency of the films. © 1979.

引用

页码：384 / 388

页数：5

共 6 条

[1] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].