SELECTIVE AREA DEPOSITION OF METALS USING LOW-ENERGY ELECTRON-BEAMS

被引：38

作者：

KUNZ, RR

ALLEN, TE

MAYER, TM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.583629

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1427 / 1431

页数：5

共 18 条

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[9] MONTE-CARLO SIMULATION OF 1-10-KEV ELECTRON-SCATTERING IN A GOLD TARGET
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[10] SURFACE-REACTION ENHANCEMENT VIA LOW-ENERGY ELECTRON-BOMBARDMENT AND SECONDARY-ELECTRON EMISSION
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