FAST DIRECT E-BEAM LITHOGRAPHIC FABRICATION OF 1ST-ORDER GRATINGS FOR 1.3-MU-M DFB LASERS

[1] 10-NM LINEWIDTH ELECTRON-BEAM LITHOGRAPHY ON GAAS [J]. APPLIED PHYSICS LETTERS, 1983, 42 (01) : 38 - 40

[2] FABRICATION OF 1ST-ORDER GRATINGS FOR 1.5 MU-M DFB LASERS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY [J]. ELECTRONICS LETTERS, 1987, 23 (11) : 590 - 592

[3] Gozdz A. S., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P2, DOI 10.1117/12.963618

[4] GOZDZ AS, 1987, ACS SYM SER, V346, P334

[5] ALGAAS/GAAS DISTRIBUTED FEEDBACK LASERS WITH 1ST-ORDER GRATING FABRICATED BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J]. APPLIED PHYSICS LETTERS, 1987, 51 (02) : 63 - 65

[6] AMORPHOUS-CARBON FILMS AS RESIST MASKS WITH HIGH REACTIVE ION ETCHING RESISTANCE FOR NANOMETER LITHOGRAPHY [J]. APPLIED PHYSICS LETTERS, 1986, 48 (13) : 835 - 837

[7] 1.5-MU-M PHASE ADJUSTED ACTIVE DISTRIBUTED REFLECTOR LASER FOR COMPLETE DYNAMIC SINGLE-MODE OPERATION [J]. ELECTRONICS LETTERS, 1984, 20 (10) : 391 - 393

[8] LIN BJ, 1983, ACS SYM SER, V210, P304

[9] NG WW, 1978, IEEE T ELECTRON DEV, V25, P1193

[10] CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS AND THEIR APPLICATION AS OVERCOATS ON THIN-FILM MEDIA FOR MAGNETIC RECORDING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (06): : 3287 - 3312

[1] 10-NM LINEWIDTH ELECTRON-BEAM LITHOGRAPHY ON GAAS [J]. APPLIED PHYSICS LETTERS, 1983, 42 (01) : 38 - 40

[2] FABRICATION OF 1ST-ORDER GRATINGS FOR 1.5 MU-M DFB LASERS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY [J]. ELECTRONICS LETTERS, 1987, 23 (11) : 590 - 592

[3] Gozdz A. S., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P2, DOI 10.1117/12.963618

[4] GOZDZ AS, 1987, ACS SYM SER, V346, P334

[5] ALGAAS/GAAS DISTRIBUTED FEEDBACK LASERS WITH 1ST-ORDER GRATING FABRICATED BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J]. APPLIED PHYSICS LETTERS, 1987, 51 (02) : 63 - 65

[6] AMORPHOUS-CARBON FILMS AS RESIST MASKS WITH HIGH REACTIVE ION ETCHING RESISTANCE FOR NANOMETER LITHOGRAPHY [J]. APPLIED PHYSICS LETTERS, 1986, 48 (13) : 835 - 837

[7] 1.5-MU-M PHASE ADJUSTED ACTIVE DISTRIBUTED REFLECTOR LASER FOR COMPLETE DYNAMIC SINGLE-MODE OPERATION [J]. ELECTRONICS LETTERS, 1984, 20 (10) : 391 - 393

[8] LIN BJ, 1983, ACS SYM SER, V210, P304

[9] NG WW, 1978, IEEE T ELECTRON DEV, V25, P1193

[10] CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS AND THEIR APPLICATION AS OVERCOATS ON THIN-FILM MEDIA FOR MAGNETIC RECORDING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (06): : 3287 - 3312