CUTOFF CHARACTERISTICS OF LEAKY SEZAWA AND PSEUDO-SEZAWA WAVE MODES FOR THIN-FILM CHARACTERIZATION

被引：42

作者：

KUSHIBIKI, J

ISHIKAWA, T

CHUBACHI, N

机构：

[1] Department of Electrical Engineering, Tohoku University

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 19期

关键词：

D O I：

10.1063/1.103982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new method of determining the elastic constants, density, and thickness of thin-film materials with the line-focus-beam acoustic microscope is developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region. It is demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C44, and density are, respectively, about 11% and 5.5% less than those for polycrystalline bulk gold, and the thickness is determined as 6370 Å.

引用

页码：1967 / 1969

页数：3

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[2]

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