APPLICATION OF LFB ACOUSTIC MICROSCOPE TO FILM THICKNESS MEASUREMENTS

被引：17

作者：

KUSHIBIKI, J

CHUBACHI, N

机构：

[1] Tohoku Univ, Sendai, Jpn, Tohoku Univ, Sendai, Jpn

来源：

ELECTRONICS LETTERS | 1987年 / 23卷 / 12期

关键词：

ACOUSTIC DEVICES - FILMS - Thickness Measurement;

D O I：

10.1049/el:19870467

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The line-focus-beam (LFB) acoustic microscope is applied to measure the precise thickness of thin films using the velocity dispersion of leaky waves in layered samples. The measurement principle and accuracy are investigated theoretically and experimentally, taking a configuration of Au-film on fused quartz. It is demonstrated at 225 MHz that a thickness resolution better than 2 A is achieved for a 3000 A sample using leaky pseudosurface acoustic waves.

引用

页码：652 / 654

页数：3

共 6 条

[1]

Anderson O. L., 1965, PHYSICAL ACOUSTIC B, V3B, P43

[2] RAPID NONDESTRUCTIVE THICKNESS MEASUREMENT OF OPAQUE THIN-FILMS ON ANISOTROPIC SUBSTRATES [J].