MEASUREMENT OF KLA BY A GASSING-IN METHOD WITH OXYGEN-ENRICHED AIR

被引:20
作者
CHANG, HN [1 ]
HALARD, B [1 ]
MOOYOUNG, M [1 ]
机构
[1] UNIV WATERLOO,DEPT CHEM ENGN,WATERLOO N2L 3G1,ONTARIO,CANADA
关键词
D O I
10.1002/bit.260340905
中图分类号
Q81 [生物工程学(生物技术)]; Q93 [微生物学];
学科分类号
071005 ; 0836 ; 090102 ; 100705 ;
摘要
引用
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页码:1147 / 1157
页数:11
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