K-BAND OPERATION OF ASYMMETRIC FABRY-PEROT MODULATORS

We report preliminary high-frequency, small-signal optical measurements of asymmetric multiple-quantum-well (MQW) Fabry-Perot electrooptic modulators which indicate that the electrical bandwidth for these devices is about 15 GHz at the onset of saturation, and as high as 21 GHz at low optical intensity-higher than any other measurements published to date. The modulators, 30-mu-m x 30-mu-m in size, are integrated with on-chip microwave probe pads. We detail here the fabrication process we developed to achieve these high operating frequencies and predict from device models the maximum RC-limited operating frequencies for these devices.