PROXIMITY EFFECTS IN ELECTRON LITHOGRAPHY - MAGNITUDE AND CORRECTION TECHNIQUES

被引：39

作者：

PARIKH, M

机构：

来源：

关键词：

711 Electromagnetic Waves - 713 Electronic Circuits - 714 Electronic Components and Tubes - 745 Printing and Reprography;

D O I：

10.1147/rd.244.0438

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：438 / 457

页数：20

共 29 条

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