PREPARATION AND CHARACTERIZATION OF THIN-FILMS OF ALUMINA BY METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION

被引：28

作者：

FOURNIER, J

DESISTO, W

BRUSASCO, R

SOSNOWSKI, M

KERSHAW, R

BAGLIO, J

DWIGHT, K

WOLD, A

机构：

[1] BROWN UNIV,DEPT CHEM,PROVIDENCE,RI 02912

[2] BROWN UNIV,MAT RES LAB,PROVIDENCE,RI 02912

[3] GTE LABS INC,WALTHAM,MA 02254

来源：

MATERIALS RESEARCH BULLETIN | 1988年 / 23卷 / 01期

关键词：

D O I：

10.1016/0025-5408(88)90221-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：31 / 36

页数：6

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