PROCESSES IN INTERFACIAL ZONES DURING CHEMICAL VAPOR-DEPOSITION - ASPECTS OF KINETICS, MECHANISMS, ADHESION AND SUBSTRATE ATOM TRANSPORT

被引：30

作者：

CARLSSON, JO

机构：

[1] Uppsala Univ, Solid State Chemistry, Group, Uppsala, Swed, Uppsala Univ, Solid State Chemistry Group, Uppsala, Swed

来源：

THIN SOLID FILMS | 1985年 / 130卷 / 3-4期

关键词：

The author is grateful to the Swedish Natural Science Research Council and the Swedish Board for Technical Development for support of work leading to this overview;

D O I：

10.1016/0040-6090(85)90358-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 282

页数：22

共 62 条

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