MONTE-CARLO CALCULATIONS OF HYDROGEN AND DEUTERIUM RANGE DISTRIBUTIONS IN LIGHT TARGET MATERIALS

被引：24

作者：

MAYER, M ^{[1
]}

ECKSTEIN, W ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,BOLTZMANNSTR 2,D-85748 GARCHING,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 94卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(94)95653-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Recent measurements of ranges and variances of 200-2000 eV H and D implanted into Be, C and Si are compared to computer calculations using the TRIM.SP program. The calculations are in good agreement with the experimental data. The influence of different energy loss models on the mean ranges and widths of the depth distributions is examined. The calculations with TRIM.SP are compared to results of calculations with the TRIM-92 and BABOUM codes.

引用

页码：22 / 26

页数：5

共 17 条

[1]

ANDERSON HH, 1977, HYDROGEN STOPPING PO, V3

[2] RANGE AND BACKSCATTERING OF HYDROGEN-IONS BELOW APPROXIMATELY-2 KEV - FITS OF THEORY TO DATA AND APPLICATION TO PLASMA MATERIALS INTERACTIONS [J].

BECERRAACEVEDO, R ;

TERREAULT, B .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (01) :1-9

[3] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[4] RANGES OF 10-30-KEV DEUTERONS IMPLANTED INTO SOLIDS [J].

BORGESEN, P ;

BOTTIGER, J ;

MOLLER, W .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) :4401-4405

[5]

DEMOND FJ, 1980, NUCL INSTRUM METHODS, V168, P69, DOI 10.1016/0029-554X(80)91233-1

[6]

Eckstein W., 1991, COMPUTER SIMULATION

[7]

Firsov O.B., 1957, ZH EKSP TEOR FIZ+, V33, P696

[8] RANGES AND VARIANCES OF 0.2-1.0 KEV HYDROGEN AND DEUTERIUM IONS IMPLANTED INTO BE, C AND SI [J].

LEBLANC, L ;

ROSS, GG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 83 (1-2) :15-20

[9] ENERGY DISSIPATION BY IONS IN KEV REGION [J].

LINDHARD, J ;

SCHARFF, M .

PHYSICAL REVIEW, 1961, 124 (01) :128-+

[10] HYDROGEN TRAPPING AND TRANSPORT IN CARBON [J].

MOLLER, W .

JOURNAL OF NUCLEAR MATERIALS, 1989, 162 :138-150

← 1 2 →