OPTICAL AND ELECTRICAL CHARACTERIZATION OF PSEUDOMORPHIC ALGAAS/INGAAS/GAAS MODULATION-DOPED STRUCTURES PROCESSED BY RAPID THERMAL ANNEALING

被引：7

作者：

DODABALAPUR, A

KESAN, VP

BLOCK, TR

NEIKIRK, DP

STREETMAN, BG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.584755

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：380 / 383

页数：4

共 25 条

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