A THEORETICAL COMPARISON BETWEEN INTERFEROMETRIC AND OPTICAL BEAM DEFLECTION TECHNIQUE FOR THE MEASUREMENT OF CANTILEVER DISPLACEMENT IN AFM

被引：40

作者：

PUTMAN, CAJ

DEGROOTH, BG

VANHULST, NF

GREVE, J

机构：

[1] Department of Applied Physics, University of Twente, 7500 AE Enschede

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90474-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.

引用

页码：1509 / 1513

页数：5

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