HIGH-QUALITY P-TYPE A SIC FILMS OBTAINED BY USING A NEW DOPING GAS OF B(CH3)3

被引：19

作者：

TARUI, H

MATSUYAMA, T

OKAMOTO, S

DOHJOH, H

HISHIKAWA, Y

NAKAMURA, N

TSUDA, S

NAKANO, S

OHNISHI, M

KUWANO, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 12期

关键词：

D O I：

10.1143/JJAP.28.2436

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2436 / 2440

页数：5

共 6 条

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[2]

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[3]

NAKANO S, 1985, MATER RES SOC S P, V49, P275

[4]

TARUI H, 1989, 4TH P INT PHOT SCI E, P213

[5] SUPERLATTICE STRUCTURE A-SI FILMS FABRICATED BY THE PHOTO-CVD METHOD AND THEIR APPLICATION TO SOLAR-CELLS [J].

TSUDA, S ;

TARUI, H ;

MATSUYAMA, T ;

TAKAHAMA, T ;

NAKAYAMA, S ;

HISHIKAWA, Y ;

NAKAMURA, N ;

FUKATSU, T ;

OHNISHI, M ;

NAKANO, S ;

KAWANO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (01) :28-32

[6] PREPARATION AND PROPERTIES OF HIGH-QUALITY A-SI FILMS WITH A SUPER CHAMBER (SEPARATED ULTRAHIGH-VACUUM REACTION CHAMBER) [J].

TSUDA, S ;

TAKAHAMA, T ;

ISOMURA, M ;

TARUI, H ;

NAKASHIMA, Y ;

HISHIKAWA, Y ;

NAKAMURA, N ;

MATSUOKA, T ;

NISHIWAKI, H ;

NAKANO, S ;

OHNISHI, M ;

KUWANO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (01) :33-38

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