A REVIEW OF THE PRESENT STATE OF ART IN HARD COATINGS GROWN FROM THE VAPOR-PHASE

被引：429

作者：

SUNDGREN, JE

HENTZELL, HTG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 05期

关键词：

D O I：

10.1116/1.574062

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2259 / 2279

页数：21

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