HIGH-RESOLUTION SYSTEMS FOR MICROFABRICATION

被引：7

作者：

BROERS, AN

机构：

来源：

PHYSICS TODAY | 1979年 / 32卷 / 11期

关键词：

D O I：

10.1063/1.2995276

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

[No abstract available]

引用

页码：38 / &

共 20 条

[1]

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